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中文摘要：
介绍了用磁增强等离子体化学气相沉积技术在连续（Roll—to—Roll）系统中，在PET薄膜表面沉积纳米SiOx阻隔层薄膜的工艺。研究了不同工艺条件下，薄膜的阻隔性能、颜色变化及其影响因素。实验得到：在单体和氧气的混合反应气体中，提高氧气的比例有利于增加薄膜透明性，并且得到的氧化硅膜由黄褐色趋近于无色透明。通过红外光谱仪对薄膜的成分进行了分析，用分光光度计和紫外可见分光光度计测量了薄膜颜色和透明性变化，分析了其影响产生的机理。
英文摘要：
The preparation of SiOx coating as barrier layer deposited on PET surface by magnetized plasma enhanced chemical vapor deposition （MPECVD） through the roll to-roll process was introduced. The factors influencing barrier performance and color change of the film under different technological conditions were studied. The result showed that PET coated with SiOx is more transparent in high oxygen concentration, and the SiOx coatings are near colorless. The composition and structure of the coatings were analyzed by Fourier transform infrared （FTIR）, and the color degree and light transmittance were analyzed by spectro-photometer and UV-Visible spectroscopy respectively. The mechanism of the influences was analyzed.
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