为研制具有高分辨率、宽频响、大行程的压电直线电机,提出了一种基于叠层压电陶瓷的圆筒形压电直线电机,并利用碟形弹簧对叠层压电陶瓷进行预紧。在分析电机工作原理的基础上对电机的结构进行了设计,并制作了原理样机,对其进行了实验研究。实验测定结果如下:在一定频率范围内定子驱动足输出振幅最大值为2μm,电机最大无负载速度为3.7mm/s,最大输出推力为4.3N。
In order to develop piezoelectric linear motor with high resolution,wide frequency response and long stroke,a cylinder type piezoelectric linear motor using piezoelectric stacks which were preloaded by disc springs was proposed.The operating principles of the motor were presented,the motor structure was designed,a prototype was made and the experimental study was proceeded.The experimental results show that within a certain range of frequency the vibration amplitude of the stator driving foot is 2μm,the maximum no-load velocity of the motor is 3.7mm/s,and the maximum thrust force of the motor is 4.3N.