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中文摘要：
提出了基于PZT的宏/微双重驱动精密定位机构,采用混合式步进电动机直接驱动宏动平台,实现系统大行程微米级精度定位,安装在宏动平台上的压电陶瓷驱动微动平台,实现纳米级的分辨率和定位精度,以高频响动态补偿系统的定位误差。采用显微视觉反馈控制微动台的移动和定位,实现定位机构的全闭环反馈控制,同时提出了带运动规划和估算的运动控制策略,提高了系统的运行速度。实验研究表明：系统的动态和稳定性能良好,该微动台的最大行程80mm,定位精度1μm。
英文摘要：
A macro-micro dual-drive ultra-precision positioning mechanism based on machine vision was presented. Combining macro with micro actuator, a system with large workspace and high resolution of motion was researched. The macro motion was driven by the motor, and PZT-drive micro stage with high frequency has been installed on the motor and compensated the position error. The micro- vision has been integrated into the closed-loop feedback, which was used to measure the position and motion the end-executive facility, was installed on the micro-platform. At the same time motion control method was adopted, which based on motion programming and motion estimation and it improved system motion speed. The experiment results showed that the travel stage was 80 mm, the repeatability positioning precision was 1μm.
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