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中文摘要：
介绍了一款微型直线超声波电动机的研制。该电机利用两个频率不相等的不对称弯振模态工作,可以实现单相驱动和两相驱动。建立了电机定子的运动学模型,分析了在单相、两相驱动下定子驱动质点的运动轨迹,推导出其椭圆运动轨迹方程。利用有限元对在不同频率驱动下定子驱动点的运动轨迹进行了仿真,检验了电机运动机理分析的正确性。制作了微型直线超声波电动机样机,该电机定子的尺寸仅为1.72 mm×1.72 mm×6mm,在驱动频率为131.9 kHz、激励电压为40 V时,电机单相、两相激励时的空载速度分别为3.9 mm/s和4.9 mm/s。
英文摘要：
A linear ultrasonic micromotor was presented. The motor operation relies on two asymmetric vibration modes of which frequencies were not equal. The motor can be driven to move by single-phase or two-phase electrical sources. A kinematics model of the stator was developed. The motion trajectories of the driving points were analyzed when the stator was excited by single-phase or two-phase electrical sources. And the expressions of elliptical trajectory were derived. Furthermore, the motion trajectories of the driving points under different driving frequencies were simulated using the finite element method. It was used to validate the correctness of the operation principle analysis. A prototype linear ultrasonic micromotor was assembled,which was small in size. The dimensions of its stator was only 1.72 mmx 1.72 mmx6 mm. When the motor was driven by single-phase and two-phase electrical sources, the speeds without load were 3.9 mm/s and 4.9 mm/s respectively at the applied voltage of 40 V and the driving frequency of 131.9 kHz.
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