为研制高精度、大行程、宽频响的压电直线电机,提出了一种基于叠层型压电陶瓷的直动式压电直线电机。分析了电机的工作原理,对电机的结构进行了设计,制作了原理样机,并进行了实验研究。实验表明,在一定频率范围内,定子驱动足纵向振幅保持不变,且最大幅值为900 nm,电机最大无负载速度为4.8 mm/s,最大输出推力为4.5 N。
In order to develop high precision,large distance,wide frequency response piezoelectric linear motor,a type of direct action piezoelectric linear motor based on the piezoelectric ceramics stack was proposed.The operating principle of the motor was presented,the motor structure was designed,a prototype was made and the experimental study was proceeded.The experimental results showed that within a certain range of frequency the motor stator driving foot longitudinal amplitude could stay the same with the amplitude of 900 nm,the maximum no-load velocity of the motor was 4.8 mm/s,the maximum thrust force of the motor was 4.5 N.