利用金属有机物化学气相淀积(MOCVD)生长了InGaN/GaN多量子阱(MQWs)结构,研究了生长停顿对InGaN/GaN MQWs特性的影响.结果表明,采用生长停顿,可以改善MQWs界面质量,提高MQWs的光致发光(PL)与电致发光(EL)强度;但生长停顿的时间过长,阱的厚度会变薄,界面质量变差,不仅In组分变低,富In的发光中心减少,而且会引入杂质,致使EL强度下降.
InGaN/GaN MQWs structures were grown by MOCVD. The effects of the growth interruption time on the optical and structural properties of InGaN/GaN MQWs were investigated. The growth interruption can improve the interface quali ty, increase the intensity of photoluminescence(PL) and electroluminescence(EL) ; but if the interruption time was too long, the well thickness and the average in composition of MQWs decreased,and the EL intensity also decreased due to poor interace quality and impurity derived by growth interruption.