Effect of chemical surface treatments on interfacial and electrical characteristics of atomic-layer-
- ISSN号:0169-4332Electronic Resource Number: 10.1016/s0169-4332(03)00702-5
- 期刊名称:Applied Surface Science
- 时间:2011
- 页码:4589-4592
- 相关项目:铪基稀土金属多元氧化物高K栅介质的基础研究