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AFM线宽测量不确定度的分析与评定
  • ISSN号：1000-1158
  • 期刊名称：《计量学报》
  • 时间：0
  • 分类：TB92[机械工程—测试计量技术及仪器;一般工业技术—计量学]
  • 作者机构：[1]福州大学机械工程及自动化学院,福建福州350108, [2]西安交通大学机械制造系统工程国家重点实验室,陕西西安710049, [3]福州大学物理与信息工程学院,福建福州350108
  • 相关基金：国家自然科学基金（90923001）;福建省教育厅项目（JA11031）;福州大学人才基金（022319）
作者： 韩国强[1,2,3], 陈玉琴[1]
关键词： 计量学, 原子力显微镜, 线宽, 测量不确定度, Metrology, Atomic force microscopy （AFM） , Linewidth , Measurement uncertainty
中文摘要：

详细分析了P47型原子力显微镜线宽测量不确定度的来源，给出了基于几何形状的线宽测量模型，提出了线宽测量不确定度的评定路线和方法。确定了探针针尖引起的测量不确定度是AFM线宽测量不确定度的主要来源，并对其进行了定量分析。普通Si3N4探针针尖引起的不确定度分量约占线宽总量的5％。

英文摘要：

The sources of linewidth measurement uncertainty of AFM type P47 are analyzed in details. A new model based on geometry shape of linewidth measurement is proposed. An uncertainty evaluation method is offered according to systematic analysis results in linewidth measurement. The measurement uncertainty component caused by traditional Si3N4 AFM tip is about 5% of the total linewidth. Finally,the main measurement uncertainty source- AFM tip is determined.

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期刊信息
  • 《计量学报》
  • 中国科技核心期刊
  • 主管单位:国家质量监督检验检疫总局
  • 主办单位:中国计量测试学会
  • 主编：赵晓娜
  • 地址：北京1413信箱
  • 邮编：100013
  • 邮箱：csml@A-1.net.cn
  • 电话：010-64271480
  • 国际标准刊号：ISSN：1000-1158
  • 国内统一刊号：ISSN：11-1864/TB
  • 邮发代号:2-798
  • 获奖情况:
  • 1992年获得中国科协优秀学术期刊二等奖,1992年获得全国优秀科技期刊三等奖
  • 国内外数据库收录:
  • 荷兰文摘与引文数据库,日本日本科学技术振兴机构数据库,中国中国科技核心期刊,中国北大核心期刊（2004版）,中国北大核心期刊（2008版）,中国北大核心期刊（2011版）,中国北大核心期刊（2014版）,中国北大核心期刊（2000版）
  • 被引量:6491