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利用典型Si(100)微结构对原子力显微镜探针参数进行表征
  • 期刊名称：计量学报
  • 时间：2010.5.5
  • 页码：426-429
  • 相关项目：纳米制造中的计量溯源与测试理论研究
作者： 韩国强|景蔚萱|蒋庄德等|
同期刊论文项目
纳米制造中的计量溯源与测试理论研究
期刊论文 90 会议论文 38 著作 1
同项目期刊论文
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