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Transformation of vibration shapes in resonances of micromachined piezoelectric circular membrane
  • ISSN号：0015-0193
  • 期刊名称：Ferroelectrics
  • 时间：2013.1.1
  • 页码：1-6
  • 相关项目：纳米制造中的计量溯源与测试理论研究
作者： Xingwei Yan, Wei Ren, Peng Shi, et al|
同期刊论文项目
纳米制造中的计量溯源与测试理论研究
期刊论文 90 会议论文 38 著作 1
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