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Resonant frequency analysis on an electrostatically actuated microplate under uniform hydrostatic pr
  • ISSN号：0022-3727
  • 期刊名称：Journal of Physics D: Applied Physics
  • 时间：2013.10.10
  • 页码：195108-195109
  • 相关项目：纳米制造中的计量溯源与测试理论研究
作者： Zhikang Li, Libo Zhao, Zhiying Ye, Hongyan Wang,|Zhuangde Jiang|
同期刊论文项目
纳米制造中的计量溯源与测试理论研究
期刊论文 90 会议论文 38 著作 1
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