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A Micro-Force Sensor with Slotted-Quad-Beam Structure for Measuring the Friction in MEMS Bearings
  • ISSN号：1424-8220 (Electronic)
  • 期刊名称：Sensors
  • 时间：2013.10.10
  • 页码：13178-13191
  • 相关项目：纳米制造中的计量溯源与测试理论研究
作者： Liu H, Yang SM, Zhao YL, Jiang ZD, Liu Y|Tian B|
同期刊论文项目
纳米制造中的计量溯源与测试理论研究
期刊论文 90 会议论文 38 著作 1
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