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Characterization of sidewall roughness for silicon microstructures in micro actuator
  • ISSN号：1383-5416
  • 期刊名称：International Journal of Applied Electromagnetics
  • 时间：2010.10.10
  • 页码：985-990
  • 相关项目：纳米制造中的计量溯源与测试理论研究
作者： Guoqiang Han, Zhuangde Jiang, Weixuan Jing et al|
同期刊论文项目
纳米制造中的计量溯源与测试理论研究
期刊论文 90 会议论文 38 著作 1
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