欢迎您！东篱公司
退出
-
申报数据库
-
立项数据库
-
成果数据库
-
项目获奖数据库
中文摘要：
A trapezoidal cantilever density sensor is developed based on micro-electro-mechanical systems(MEMS) technology.The sensor measures fluid density through the relationship between the density and the resonant frequency of the cantilever immersed in the fluid.To improve the sensitivity of the sensor,the modal and harmonic response analyses of trapezoidal and rectangular cantilevers are simulated by ANSYS software.The higher the resonant frequency of the cantilever immersed in the fluid,the higher the sensitivity of the sensor;the higher the resonant strain value,the easier the detection of the output signal of the sensor.Based on the results of simulation,the trapezoidal cantilever is selected to measure the densities of dimethyl silicone and toluene at the temperature ranges of 30 to 55 ℃ and 26 to 34 ℃,respectively.Experimental results show that the trapezoidal cantilever density sensor has a good performance.
英文摘要：
A trapezoidal cantilever density sensor is developed based on micro-electro-mechanical systems （MEMS） technology. The sensor measures fluid density through the relationship between the density and the resonant frequency of the cantilever im-mersed in the fluid. To improve the sensitivity of the sensor, the modal and harmonic response analyses of trapezoidal and rec-tangular cantilevers are simulated by ANSYS software. The higher the resonant frequency of the cantilever immersed in the fluid, the higher the sensitivity of the sensor; the higher the resonant strain value, the easier the detection of the output signal of the sensor. Based on the results of simulation, the trapezoidal cantilever is selected to measure the densities of dimethyl silicone and toluene at the temperature ranges of 30 to 55 ℃ and 26 cantilever density sensor has a good performance. to 34 ℃, respectively. Experimental results show that the trapezoidal cantilever density sensor has a good pertbrmance.
同期刊论文项目
同项目期刊论文
Prediction of transport properties of pure noble gases and some of their binary mixtures by ab initi
Determination of mass diffusion coefficients of oxygenated fuel additives in air using digital real-
Development of a Piezoresistive Force Transmitter for Gauging Yarn';s Linear Density in High-Speed T
Development of a Piezoresistive Force Transmitter for Gauging Yarn's Linear Density in High-Speed Te
In-situ Measurement of Fluid Density Rapidly Using a Vibrating Piezoresistive Microcantilever Sensor
Influences of post-annealing on structural and electrical properties of Bi1.5Zn1.0Nb1.5O7 thin films
Enhanced structures and electrical properties of lead-free K0.5Na0.5NbO3-Bi0.5Na0.5TiO3 0-3 composit
Humidity response properties of a potentiometric sensor using LaF3 thin film as the solid electrolyt
Effect of oxygen pressure on structure and properties of Bi1.5Zn1.0Nb1.5O7 pyrochlore thin films pre
Effect of SrTiO3 buffer layers on crystallization and properties of sol-gel derived Pb(Zr0.52Ti0.48)
Structure and Electrical Properties of Na0.5Bi0.5TiO3 Ferroelectric Thick Films Derived from a Polym
Structural and Dielectric Properties of Bi2Zn2/3Nb4/3O7 Thin Films Prepared by Pulsed Laser Depositi
Influence of substrate temperature on structures and dielectric properties of pyrochlore Bi1.5Zn1.0N
Surface roughness and geometrical characterization of ultra-thick micro moulds for ceramic micro fab
Net shape manufacturing of ceramic micro parts with tailored graded layers for functional micro devi
Effects of thickness on structures and electrical properties of K0.5Na0.5NbO3 thick films derived fr
Structures and Dielectric Properties of Pyrochlore Bismuth Zinc Niobate Thin Films with Zinc Compens
Structures and electrical properties of Mn- and Co-doped lead-free ferroelectric K0.5Na0.5NbO3 films
Structural, dielectric, ferroelectric and piezoresponse force microscopy characterizations of bilaye
Structure and microwave dielectric properties of Bi1.5Zn1.0Nb1.5O7 thin films deposited on alumina s
Effects of deposition temperature on structure and properties of (K0.48Na0.52)NbO3 ferroelectric thi
Effect of excess Bi2O3 on structures and dielectric properties of Bi1.5Zn1.0Nb1.5O7 thin films depos
Microwave dielectric properties of bismuth zinc niobate thin films deposited on alumina by pulsed la
Synthesis, structure and dielectric properties of (1-x)[0.9BiFeO3-0.1DyFeO3]-xPbTiO3 pseudo-binary c
Effect of Mn doping on structures and properties of chemical solution deposited lead zirconate titan
Structural and electric properties of Bi2Zn2/3Nb4/3O7 thin films prepared by pulsed laser deposition
Resonant frequency analysis on an electrostatically actuated microplate under uniform hydrostatic pr
Enhanced ferroelectric properties of highly (100) oriented Pb(Zr0.52Ti0.48)O3thick films prepared by
Electric and Magnetic Properties of Bilayered Lead-Free Piezoelectric and Multiferroic Bi 0.9 Dy 0.1
Effect of deposition temperature on orientation and electrical properties of (K0.5Na0.5)NbO3 thin fi
Preparation and electrical properties of Bi2Zn2/3Nb4/3O7 thin films deposited at room temperature fo
Structures and Dielectric Properties of Bi1.5Zn1.0Nb1.5O7 Thin Films Prepared by Pulsed Laser Deposi
Surface Stress-induced deflection of a microcantilever with various widths and overall microcantilev
期刊信息
位置：