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Surface Stress-induced deflection of a microcantilever with various widths and overall microcantilev
  • 期刊名称：Journal of Physics D: Applied Physics
  • 时间：2011.10.10
  • 页码：425402-425405
  • 相关项目：纳米制造中的计量溯源与测试理论研究
作者： Guiming Zhang, Libo Zhao, Zhuangde Jiang, et al|
同期刊论文项目
纳米制造中的计量溯源与测试理论研究
期刊论文 90 会议论文 38 著作 1
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