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A trapezoidal cantilever density sensor based on MEMS technology
  • 期刊名称：Journal of Zhejiang University-Science C(Computers
  • 时间：2013.4.4
  • 页码：274-278
  • 相关项目：纳米制造中的计量溯源与测试理论研究
作者： Libo Zhao, Longqi Xu, Guiming Zhang, Yulong Zhao,|Zhuangde Jiang|
同期刊论文项目
纳米制造中的计量溯源与测试理论研究
期刊论文 90 会议论文 38 著作 1
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