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Multiple replication of thick PDMS micro patternsusing surfactants as release agents
  • ISSN号：0167-9317
  • 期刊名称：Microelectronic Engineering
  • 时间：2011.11.11
  • 页码：3275-3277
  • 相关项目：纳米制造中的计量溯源与测试理论研究
作者： H. Hassanin ,K. Jiang|
同期刊论文项目
纳米制造中的计量溯源与测试理论研究
期刊论文 90 会议论文 38 著作 1
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