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中文摘要：
针对气体检测中分光应用的闪耀光栅，该文在硅片上制备聚甲基丙烯酸甲脂（PMMA）薄膜，采用热压印及后续工艺制备了硅基的聚甲基丙烯酸甲脂闪耀光栅，通过实验分析研究了复制闪耀光栅的保真特性。研究表明，通过聚甲基丙烯酸甲脂制备、热压印及后续工艺可得到具有高保真性的微闪耀光栅，而这种方法所获得的闪耀光栅与传统方法加工的闪耀光栅相比，在效率、成本方面均具有较明显的优势。
英文摘要：
For the wavelength division applications to the gas measurement, the Si-based PMMA flash grating has been fabricated through preparing PMMA film on Si substrate by using the hot-embossing lithography （HEI.） and the follow-up processes in this work. The fidelity of the duplicated flash grating has also been studied and analyzed by experiment. The results showed that the micro flash grating with high fidelity could be obtained by preparing PMMA film and using the HEL as well as the follow-up processes. The reported flash grating has significant cost-effective advantage over the conventional flash grating.
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