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中文摘要：
采用甚高频等离子体增强化学气相沉积技术,在前期单室沉积的微晶硅薄膜太阳电池和非晶硅/微晶硅叠层太阳电池研究的基础上,通过对微晶硅底电池本征层硅烷浓度的优化,获得了初始效率达到11.02%（电池面积1.0cm2）的非晶硅/微晶硅叠层太阳电池.同时,100cm2的非晶硅/微晶硅叠层太阳电池的组件效率也达到了9.04%.
英文摘要：
Based on the previous research on the deposition of amorphous/microcrystalline （micromorph） silicon tandem solar cells,silane concentration for the deposition of microcrystalline bottom cell is selected to further optimize the performance for micromorph tandem solar cells by using very high frequency technique.Finally,micromorph silicon tandem solar cell with 11.02% （Area = 1.0cm2 ） initial conversion efficiency is fabricated at a certain silane concentration,and it has a structure suitable for trapping light.Furthermore,100cm2 micromorph module with 9.04% initial conversion efficiency is also successfully obtained.
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