在产业化比较成熟的单室沉积非晶硅薄膜太阳电池基础上,进行了非晶硅/非晶硅/微晶硅三叠层太阳电池性能优化的研究.在生产线上纯单室沉积的非晶硅/非晶硅叠层太阳电池基础上,通过调节n-p隧穿结并采用自行研制开发的单室微晶硅底电池的沉积路线,获得了单室沉积的光电转换效率达到9.52%的非晶硅/非晶硅/微晶硅三叠层太阳电池.
Low-cost triple junction solar cells,which much attention has been paid to by industry,are studied in this paper.Based on the amorphous silicon/amorphous silicon tandem solar cells realized in industry using completely single chamber deposition technique,amorphous silicon/amorphous silicon/microcrystalline silicon triple junction solar cell with 9.52% conversion efficiency is fabricated by changing deposition conditions for microcrystalline bottom solar cell and n-p junction in a single chamber developed on our own.