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中文摘要：
利用超声喷雾热解(USP)技术,以普通玻璃为衬底,制备了不同衬底温度下的系列ZnO薄膜。用扫描电镜(SEM)和X射线衍射(XRD)研究了衬底温度对ZnO结构的影响。结果表明,薄膜的微观结构随衬底温度变化显著。在410℃获得了ZnO纳米棒,纳米棒直径在50 nm左右,沿c轴择优生长,结晶质量较好。
英文摘要：
ZnO thin films were grown on glass substrate by ultrasonic spray pyrolysis(USP) under different substrate temperatures.The surface morphology and structural properties of ZnO thin films were studied by scanning electron microscope(SEM) and X-ray diffraction(XRD),respectively.The results indicated that the microstructure of ZnO thin films has changed obviously with substrate temperature.We obtained ZnO nanorods at 410 ℃.These ZnO nanorods,in the diameters of ～50 nm,were grown along the c axis.The crystalliza...
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