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中文摘要：
穿透深度预测是电子束液态曝光技术中的一个重要课题.采用对比分析的方法对Monte Carlo模拟和Grun公式在预测液体抗蚀剂穿透深度中的适用性进行了研究,得出了可以使用这两种方法对高能电子在液体抗蚀剂中的穿透深度进行预测的结论,并以环氧618为液体抗蚀剂进行实验验证,证明了结论的正确性,拓宽了两种方法的适用范围,为不同厚度液体抗蚀剂涂层穿透所需加速电压的快速、准确选定提供了参考依据.
英文摘要：
It is an important subject to forecast the penetration depth of high energetic electrons in liquid resists in electron-beam liquid lithography. The application of Monte Carlo simulation and Grun formula in forecasting the penetration depth of electrons in liquid resists were comparably researched and a conclusion was obtained that both the methods can be used to forecast the penetration depth of high energy electrons in liquid resists. For Epoxy 618, the results show the forecasting penetration depths are in agreement with the experimental results, indicating that the conclusion is right and applications of both the methods are improved. These provide some references for fast and exactly selecting the accelerative voltage used for solidification of liquid resist layers with different thickness.
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