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中文摘要：
对甚高频等离子体增强化学气相沉积技术制备的微晶硅薄膜太阳电池进行了研究.喇曼测试结果显示：微晶硅薄膜太阳电池在p/i界面存在着一定的非晶孵化层.孵化层的厚度随硅烷浓度的增加或辉光功率的降低而增大.可以通过适当的硅烷浓度或适当的辉光功率来降低孵化层的厚度.
英文摘要：
The structure of microcrystalline silicon thin film solar cells prepared by very high frequency plasma enhanced chemical vapor deposition,is studied. Raman measurements indicate that there is an amorphous incubation layer at the p/i interface in the solar cells. The thickness of the incubation layer increases with increasing silane concentration and decreasing discharge power. A suitable silane concentration and discharge power can be used to reduce the thickness of the incubation layer.
同期刊论文项目
同项目期刊论文
Influence of front electrode and back reflector electrode on the performances of microcrystalline si
Study of space voltage distribution between large-area parallel-plate electrodes for very high frequ
Study on the optical and electrical properties of plasma for the deposition of microcrystalline sili
Study of one-dimensional spatial distribution of the plasma luminous radicals during depositing sili
Modeling and experiments of high-pressure VHFSiH4/H-2 discharges for higher microcrystalline silicon
Influence of low rate p/i interface layer on the performance of high growth rate microcrystalline si
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