快速倾斜镜(FSM)是自适应光学系统中提高系统传输精度的关键器件。针对快速倾斜镜的应用背景,采用巨磁致伸缩材料作为驱动组元,研制适用于新型快速倾斜镜的巨磁致伸缩材料作动器,并对作动器的输出位移、输出力及振动模态进行了研究。采用超高温度梯度区熔定向凝固法制备了具有〈112〉轴向择优取向的TbDyFe巨磁致伸缩合金,其10MPa预压力时平行于外磁场方向的饱和磁致伸缩性能达到0.175%,线性段磁致伸缩性能超过0.12%。所研制的巨磁致伸缩材料作动器的准静态位移超过±40μm,输出力达到1000N以上,并且具有良好的动态响应。巨磁致伸缩材料作动器在1kg负载时的一阶共振频率达到97Hz。这为新型快速倾斜镜系统的研制建立了良好的基础。
The fast steering mirror (FSM) is a key part to improve the systemic transmitted accuracy in self-adaptive optical system. According to the applications of FSM, the giant magnetostrictive material is used as driving unit to develop the giant magnetostrictive actuator suitable for FSM. The stroke, output displacement and vibrating model of actuator are studied. The giant magnetostrictive TbDyFe alloy is made through zonemelted directional-solidification method with super high temperature gradient, and has a 〈112〉 preferred orientation. At 10 MPa pre-pressure, its saturated magnetostriction gets to 0. 175 %, and the linear section length exceeds 1.2%. The quasi-static displacement gets to ±40μm. The output force is over 1 000 N. Using 10 mm diameter TbDyFe alloy rod, the first order natural frequency of the actuator is 97 Hz when bracing 1 kg mass. The above conditions make a good foundation for the research on FSM system.