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中文摘要：
针对电学原理的加速传感器在大温差、高电磁干扰的环境中的使用受限制，以及二氧化硅等无机材料制作的多模干涉器韧性差、折射率调节困难、尺寸较大等问题，提出了聚酰亚胺波导材料的多模干涉器结构集成光学加速度传感器。在外力作用下多模干涉器的输入／输出光场与干涉区会产生相对位移，导致各模式激励系数发生改变，通过输出场强的变化测得加速度。利用束传播法分析多模干涉结构以及环境温度与波导输出性能关系，以及有限元法分析力学结构对传感器性能的影响，结果表明这种传感器具有加工冗余度高、温度稳定性高和线性度较好等优点。
英文摘要：
Polyimide accelerometer based on the multimode interference is proposed which is against the weakness of the electronic sensors in the environment of large temperature fluctuation and electromagnetic interference,and against the difficulty index adjustment and the inflex/bility of the inorganic materials. The acceleration is determined by the optical power, as the field excitation efficient changes with the relative displacement between the input/output waveguide and the multimode section under acceleration. The optimum mechanical structure and optical propagation are analyzed by the finite-element-method and beam propagation method respectively. The results show that the accelerometer is of large allowable fabrication tolerance,good temperature stability and linearity.
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