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中文摘要：
针对压电材料在逆压电效应下具有极快响应速度的特点，研究并测试了压电陶瓷在阶跃激励下阶跃响应时间及其输出特性，利用其响应时间短输出带宽大的特性，研究了压电陶瓷作为激励源在微结构动态测试上的应用，并建立了压电陶瓷底座激励装置，成功测试了几种MEMS微结构的谐振频率；利用其在极短响应时间内输出大加速度的特点，研究了压电陶瓷在大量程加速度传感器灵敏度测试上的应用，结果显示压电陶瓷瞬时输出最大加速度达上万gn。
英文摘要：
Based on the fast response speed of piezoceramies in inverse piezoelectric effect, the output characteristic has been studied and the response has been measured under step voltage excitation. With the short response time and broad excitation bandwidth of piezoceramics, the application of piezoceramics＇ inverse effect as driving source of the excitation device in dynamic testing for microstructure has been studied. The base excitation device with piezoceramics has been established. With the impulse excitation of the piezoceramics base excitation device, the dynamic characteristics of several MEMS structures are obtained. The piezoceramics can generate high acceleration in short response time, and it can be applied in the sensitivity testing for the wide range accelerometer. The sensitivity testing experiment result shows that the piezoceramics can generate ten thousands gn acceleration.
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