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中文摘要：
目前基于压阻式MEMS加速度计的测量精度还不是很高，为了提高其精度，文中采用TI公司新一代的数字信号处理器TMS320F2812实时操作系统，通过对复合量程微加速度计的特性分析，找出加速度计温度漂移的变化规律；采取温度补偿措施消除温度变化带来的测量误差；系统依据数字温度传感器DS18820提供温度参数，采用最小二乘法的软件算法对测量数据进行补偿处理；该系统处理时间短，可以满足其使用要求，算法简单有效，可以显著提高测量精度；实用表明使用高速DSP器件并采用有效的信号处理方法可以显著地改善MEMS加速度计的性能。
英文摘要：
At present, MEMS--based on piezoresistive accelerometer measurement accuracy is not very high, in order to improve its accuracy, in this paper utilizes a new digital signal processor TMS320F2812 real--time operating system of TI＇s, through the composite scale analysis of the characteristics of micro--accelerometers, to find out the changes of temperature drift of accelerometer. Temperature compensation will takes measures to eliminate measurement errors caused by temperature changes. The system is based on temperature parameters what digital temperature sensor DS18B20 provides, using the least squares method of software algorithms to compensate for measurement data processing. The system handles with a short time, to meet its requirements, the algorithm is simple and effective, can significantly improve the measurement accuracy; practical devices that use high--speed DSP and the use of effective signal processing method can significantly improve the performance of MEMS accelerometers.
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