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中文摘要：
利用宏模型对MEMS系统进行系统级仿真是求解MEMS耦合问题的有效方法。对大规模系统方程通过矩阵子空间投影实现自由度缩聚来建立宏模型的方法得到了广泛应用。常用的Krylov子空间法只能对状态空间描述的一阶系统进行降阶处理。本文介绍了二阶Krylov子空间理论,运用Arnold i算法直接对大规模二阶系统进行自由度缩聚来生成宏模型。将此方法与有限元数值分析结合对电热驱动微夹钳进行了宏建模。对电热微夹钳宏模型的仿真结果表明此方法建立的宏模型可以准确反应系统的动态行为,满足精度要求,同时极大地降低了计算复杂度,提高了计算速度。
英文摘要：
The method based on macromodel to process a system -level simulation for Micro -Electro - Mechanical Systems most of which are cross multiple physical coupled energy domains has became a famous research field. For a large scale system function, the matrix subspace projection in order to reduce model order has a broad application recently. The conventional Krylov subspace method could be used only in state - space models which are first - order type. The approach used in our study is known as second - order Krylov subspace theory and can make reduced - order models based on Arnoldi algorithm directly for second - order systems. Using this method the macromodel of electrothermal microgripper is created combined with finite element tools. We took the structure - electro - thermal analysis to microgripper using reduced - order model and the result is exact compared with finite element analysis even more has a few computing consuming and time.
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