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中文摘要：
根据光学干涉显微法原理，设计开发了一套微纳结构表面形貌测量系统。该系统采用林尼克干涉显微镜，通过参考镜扫描的方法将扫描器与相移器集为一体，分别采用五步相移算法和基于采样定理的包络均方函数（SEST）算法实现相移干涉法（PSI）和垂直扫描干涉法（VSI）两种模式对微纳结构的表面形貌测量。为验证该系统性能，采用标准多刻线样板和标准台阶作为样件对VSI和PSI两种模式分别进行了测量实验。结果证明，该系统能够完成微纳结构表面形貌的快速精确测量，可以满足微电子、微机电系统中微纳结构的表面形貌测量要求。
英文摘要：
A profilometer was developed for micro-nano structure profile testing on the basis of interferometry and micro vision system. A Linik interferometer was adopted in this profilometer, in which the scanner and the phase shifter were integrated through scanning the reference mirror. The five-step phase-shift algorithm was selected for Phase Shift Interferometry （PSI） mode and the Squared-Envelope function estimation by Sampling Theory （SEST） algorithm was selected for Vertical Scanning Interferometry （VSI） mode. The experiments that used a standard multi-indents structure and a standard step structure to test PSI mode and VSI mode respectively verified that the profilometer could measure the profile of the micro-nano structure quickly and accurately, and be applied in the measurement of micro-electronics and micro electronic mechanic system.
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