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中文摘要：
针对纳米振动测量方法中存在的间接性、低分辨率、低带宽等局限性,建立了原子力显微镜（AFM）的轻敲模式下探针与振动样品间相互作用的振动系统模型,采用Runge-Kutta数值积分方法分析了AFM测振技术的可行性和工作带宽。使用静电激励的双端固支纳米梁作为测试结构,采用AFM轻敲模式测试了样品的幅频响应特性。同时采用显微激光多普勒测振系统进行了比对测试,测量结果与AFM轻敲力曲线模式的测量结果相符,也表现出AFM轻敲模式的测量误差具有与测试样品相关的频率特性。
英文摘要：
Aimed at solving the problems of indirect measurement,low resolution and low bandwidth existing in the methods applied to the nano-vibration measurement,a vibration system model of the interaction between the probe and the vibration sample under the tapping-mode AFM has been established.Runge-Kutta numerical method is used to analyze the feasibility and the bandwidth of AFM vibration measuring technique.Taking fixed-fixed nanobeam resonator under the electrostatic actuation as the measured sample,the out-of-plane amplitude frequency response characteristics are measured under the tapping mode AFM.Meanwhile the comparison testing is carried out by the micro-laser Doppler vibrometer,and the accordant results are gained.The frequency speciality of vibration measurement error of tapping mode AFM is related with the measured frequency of the sample.
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