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中文摘要：
由于MEMS高g加速度传感器固有频率低，导致测试过程中出现谐振现象。本文分析了传感器的特殊结构参数对固有频率影响，提出了一种优化固有频率的方法。该方法通过减小质量块质量和优化梁厚度与长度的比例来调整传感器的固有频率，并通过理论仿真验证了该结构的固有频率从330kHz提高到550kHz，然后利用动态测试系统对优化前后的高g加速度传感器分别在20000g和150000g作用下测试输出信号。实验表明该优化方法提高了该类传感器结构的固有频率，明显消除了测试中的谐振现象。
英文摘要：
Because of the low natural frequency of the MEMS high-g acceleration sensors, the resonance phenomenon occurs during the test. In the text, the parameters of the special structure of the sensor on the impact of the natural frequency is analyzed, and a method of optimizing the natural frequency is put forward. The main point is to reduce the quality of proof mass and optimize the ratio of the thickness and length of the beam, which optimizes the natural frequency of the sensor. The optimizition method was validated that the natural frequency of the structure can be improved from 330kHz to 550kHz by theoretic analysis. After being optimizated, the high-g accelerometer was tested the output signal at 20, 000g and 150, 000g by using the dynamic test systems. The experiment shows that the optimization method can improve the natural frequency of the structure of the sensor and eliminate the resonance phenomenon.
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