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中文摘要：
根据分形几何理论，用W—M函数表征压阻式加速度传感器固支梁的表面形貌，并且提出把分形参数D与传统统计参数咫结合起来共同评定微观形貌质量。利用MSA-400-TPM2型白光干涉仪对其进行测量，通过实验验证。
英文摘要：
The W-M function was adopted to characterize the fixed strutbeam surface micro-shape of piezoresistive-accelerometer sensor according to the fractal geometry theory. The fractal parameter D was proposed to combine with the traditional statistical parameter Ra to jointly evaluate its micro-shape quality. MSA-400-TPM2 white-light interfering device was used to measure the fixed strutbeam. The conclusion was oroved through experiments.
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