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中文摘要：
针对柔性技术对柔性可拉伸电极的需求,提出一种在聚二甲基硅氧烷（PDMS）柔性衬底上制备具有周期为8μm＂三角波＂结构Ag薄膜电极的方法。采用MEMS工艺技术制作柔性电极模板,结合PDMS倒模、plasma表面修饰、磁控溅射金属Ag的方法,制备了可拉伸柔性电极。通过测量柔性电极的初始电阻值、阻值与柔性衬底拉伸形变量的关系以及柔性电极的拉伸极限,测试结果表明该方法实现了粘附性能好、初始阻值小、重复性可靠、电阻变化速率小、拉伸形变为65%的可拉伸柔性电极。同时该方法制备的柔性电极尺寸、周期等参数可控,应用领域得到延伸,可适应不同需求的柔性电极的制备。
英文摘要：
A flexible stretchable electrode was designed using MEMS fabrication process and was tested and presented accord- ing to the need of flexible stretchable electrodes in flexible technology.The electrode was composed of silver-coated ＂ Triangular wave＂ structures based on the Polydimethylsiloxane （PDMS） ,wave period is 8 μm.First, SU-8 ＂Triangular wave＂ structures on the master are replicated into PDMS by a conventional soft lithography process.The PDMS mold was then sputtered metals of silver af- ter surface treatment by plasma to produce stretchable electrode.Finally, the initial resistance of flexible electrode, resistance value and tensile limit were investigated with form variables of flexible substrate.The flexible stretchable electrode exhibits good adhesion performance, the initial resistance is small, repetitive, reliable, has minor changes rate of resistance ,65% of the tensile deformation. Result shows that the technology was excellent in terms of adjustable size and cycle-controlled of stretchable electrode, which has wide application field.
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