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射频感应耦合Ar2-N2 等离子体物理特性的 Langmuir 探针测量及理论研究
  • 期刊名称：物 理 学 报
  • 时间：0
  • 页码：5123-5129
  • 语言：中文
  • 相关项目：低气压多频等离子体与材料表面相互作用
作者： 王友年|毛　明　|丁振峰　|高　飞　|
同期刊论文项目
低气压多频等离子体与材料表面相互作用
期刊论文 80 会议论文 8
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