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Hysteresis induced by gap length effects in capacitively coupled plasmas at low pressures
  • 期刊名称：J. Phys. D: Appl. Phys.
  • 时间：0
  • 页码：102005-1-102005-5
  • 语言：英文
  • 相关项目：低气压多频等离子体与材料表面相互作用
作者： Hong-yuWang|You-nianWang|Shu-xia Zhao|Wei Jiang|
同期刊论文项目
低气压多频等离子体与材料表面相互作用
期刊论文 80 会议论文 8
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