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Surface-charging effect of capacitively coupled plasmas driven by combined dc/rf sources
  • 期刊名称：J. Vac. Sci. Technol. A
  • 时间：0
  • 页码：287-292
  • 语言：英文
  • 相关项目：低气压多频等离子体与材料表面相互作用
作者： Shu-Xia Zhao|You-Nian Wang|Quan-Zhi Zhang|Wei Jiang|
同期刊论文项目
低气压多频等离子体与材料表面相互作用
期刊论文 80 会议论文 8
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