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中文摘要：
目的研究热阴极直流放电氢等离子体中电子及活性粒子输运过程。方法Monte Carlo模拟方法。结果建立了电子及活性粒子在氢等离子体辉光放电中的输运模型，得到了荷能粒子在放电空间的能量分布，空间分布以及发生各种化学反应的频率分布。结论模拟结果与有关文献报道的实验结果对比，取得了较好的一致性，可利用于更多有氢等离子体参与的实验研究。
英文摘要：
Aim To study the behavior of electron and active particles in the hot filament assisted glow discharge of hydrogen plasma. Methods Monte Carlo simulation. Results The transport model of electrons and active particles in hydrogen plasma glow discharge were built and the energy distribution, spatial distribution and reaction rate of electrons, hydrogen atoms, H1^＋ , H2^＋ , H3^＋ ions in the discharge space were got. Conclusion The results are highly consistent with the spectroscopic and mass spectrum result published before. This work can be used in more researches which include hydrogen plasma.
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