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Numerical investigation of ion energy distribution and ion angle distribution in a dual-frequency ca
  • 期刊名称：PHYSICS OF PLASMAS
  • 时间：0
  • 页码：113501-1-113501-10
  • 语言：英文
  • 相关项目：低气压多频等离子体与材料表面相互作用
作者： Xiang Xu|You-Nian Wang|Shuai Wang|
同期刊论文项目
低气压多频等离子体与材料表面相互作用
期刊论文 80 会议论文 8
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