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Ohmic Contact Formation of Sputtered TaN on n-Type Ge with Lower Specific Contact Resistivity
  • 期刊名称：ECS Journal of Solid State Science and Technology
  • 时间：2012.7.17
  • 页码：30-33
  • 相关项目：硅基锗材料外延及其相关器件基础研究
作者： Zheng Wu|Chen Wang|Wei Huang|Cheng Li|Hongkai Lai|Songyan chen|
同期刊论文项目
硅基锗材料外延及其相关器件基础研究
期刊论文 141 会议论文 16
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