本文设计了一种基于Franz—Keldy,sh(FK)效应的GeSi电吸收调制器.调制器集成了脊形硅单模波导.光由脊形硅波导以倏逝波形式耦合进锗硅吸收层.在硅基锗二极管FK效应实验测试的基础上,有源区调制层锗硅中的硅组分设计为1.19%,从而使得器件工作在C(1528-1560nm)波段.模拟结果显示该调制器的3dB带宽可达64GHz,消光比为8.8dB,而插损仅为2.7dB.
We present a novel GeSi electro-absorption (EA) modulator design on a silicon-on-insulator platform. The GeSi EA modulator is constructed based on the Franz-Keldysh (FK) effect. The light is evanescent-coupled into the GeSi absorption layer from the rib Si waveguide. A contnet of 1.19% Si in SiGe absorption layer is chosen for C (1528-1560 nm) band operation. Simulation shows a high (3 dB) bandwidth of - 64 GHz and extinction ratio of 8.8 dB. Especially the insertion loss is as low as 2.7 dB.