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Detection and analysis of residual strain of epitaxial Ge films on Si substrates
  • 期刊名称：Journal of Optolelectronics ?Laser
  • 时间：2012.9.1
  • 页码：1749-1753
  • 相关项目：硅基锗材料外延及其相关器件基础研究
作者： ZHOU Zhi-wen|LI Cheng|YU Jin-zhong|
同期刊论文项目
硅基锗材料外延及其相关器件基础研究
期刊论文 141 会议论文 16
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