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Physical and electrical properties of thermally oxidized dielectrics on Si-capped Ge-on-Si substrate
  • 期刊名称：J. Vac. Sci. Technol. B
  • 时间：2012.1.1
  • 页码：011202-011202
  • 相关项目：硅基锗材料外延及其相关器件基础研究
作者： Yuanyu Zheng|Guanzhou Liu|Cheng Li|Wei Huang|Songyan Chen|Hongkai Lai|
同期刊论文项目
硅基锗材料外延及其相关器件基础研究
期刊论文 141 会议论文 16
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