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Effects of Rapid Thermal Process Temperatures on Strain and Si Concentration Distributions in Ge-on-
  • ISSN号：2162-8742
  • 期刊名称：ECS Solid State Letters
  • 时间：2014
  • 页码：Q33-Q35
  • 相关项目：硅基锗材料外延及其相关器件基础研究
作者： Zuo, Y. H.|Li, C. B.|Wang, Q. M.|Cheng, B. W.|
同期刊论文项目
硅基锗材料外延及其相关器件基础研究
期刊论文 141 会议论文 16
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