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Ge-on-Si for Si-based integrated materials and photonic devices
  • ISSN号:1674-1056
  • 期刊名称:《中国物理B:英文版》
  • 时间:0
  • 分类:TN814[电子电信—信息与通信工程] TN2[电子电信—物理电子学]
  • 作者机构:[1]State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 相关基金:Acknowledgements This work was supported by the National High Technology Research and Development Program of China (No. 2011AA010302), the National Natural Science Foundation of China (Grant Nos. 61036003, 61176013, 60906035, 61177038), and by Tsinghua National Laboratory for Information Science and Technology (TNList) Cross- discipline Foundation.
中文摘要:

这份报纸在 Ge-on-Si 的 photonic 设备申请考察最近的进步。因为有 Si 互补 metal-oxide-semiconductor (互补金属氧化物半导体) 的成熟取向附生的技术和相容性, Ge-on-Si 材料和光设备是基于 Si 的 optoelectronic 集成的合适的候选人技术。最近,电泵的 Ge 的现实点亮射出二极管(带)并且光泵的脉搏 Ge 激光, Ge 量井调节的人基于量空限制效果,波导 Ge 调节的人基于 Franz-Keldysh ( FK )效果,和高效在红外线附近的 Ge 察觉者,用 Ge photonic 设备显示了 基于Si 的 optoelectronic 集成。Ge-on-Si 材料也是一个重要平台为 Sibased optoelectronic 集成在它上种另外的材料。InGaAs 和 GeSn 在 Ge-on-Si 上被种了。带的 InGaAs 和 GeSn 光电探测器成功地也被制作了。

英文摘要:

This paper reviews the recent progress in photonic devices application of Ge-on-Si. Ge-on-Si materials and optical devices are suitable candidates for Si-based optoelectronic integration because of the mature epitaxial technique and the compatibility with Si complementary metal-oxide-semiconductor (CMOS) technology. Recently, the realities of electric-pump Ge light emitting diode (LED) and optical-pump pulse Ge laser, Ge quantum well modulator based on quantum Stark confined effect, waveguide Ge modulator based on Franz-Keldysh (FK) effect, and high performance near-infrared Ge detector, rendered the Si-based optoelectronic integration using Ge photonic devices. Ge-on-Si material is also an important platform to grow other materials on it for Si- based optoelectronic integration. InGaAs and GeSn have been grown on the Ge-on-Si. InGaAs LED and GeSn photodetector have been successfully fabricated as well.

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期刊信息
  • 《中国物理B:英文版》
  • 中国科技核心期刊
  • 主管单位:中国科学院
  • 主办单位:中国物理学会和中国科学院物理研究所
  • 主编:欧阳钟灿
  • 地址:北京 中关村 中国科学院物理研究所内
  • 邮编:100080
  • 邮箱:
  • 电话:010-82649026 82649519
  • 国际标准刊号:ISSN:1674-1056
  • 国内统一刊号:ISSN:11-5639/O4
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  • 被引量:406