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中文摘要：
多孑L硅具有大量孔洞，能有效缓解体积膨胀带来的压力，有望成为锂离子硅基负极材料的一个研究方向．采用光助电化学腐蚀、二次化学腐蚀制备高孔隙率n型多孔硅材料，通过优化后的光助电化学腐蚀，样品的孔径约为800～1000nm，多孑L层厚度（平均孔深）约为155μm，孔隙率约74％．二次腐蚀后，样品孔径增加到1．1μm，多孔层厚度减小到110μm，孔隙率增加到84％，表明二次腐蚀增加了样品的孔径和孔隙率．以二次腐蚀的多孔硅材料为负极的锂离子半电池在0．05C的恒流充放电循环测试下，循环20次后充放电比容量保持在188和198mAh／g，效率保持90％以上．实验结果表明，多孔硅锂电极比单晶硅锂电极具有更长的循环寿命，可有效提高锂电池的性能．
英文摘要：
Porous silicon can incorporate large amounts of Li and relieve the stress during lithiation with large superficial area and high porosity. N-porous silicon was produced by photoelectrochemical etching and chemical over-etching. The SEM images shows：the porous silicon materials produced by photoelectrochemical etching have 155 gm-long and 1μm-wide macropores. After chemical over- etching carried out in porous silicon, the materials had 220 nm-wide walls and pores with diameter of 1.1μm,respectively. The thick- ness of porous layer is 110μm. Chemical over-etching enlarged diameters of holes,which increased poriness of the materials. At a rate of 0.05 C, the charged/discharge capacity of the cell with porous silicon materials as anode was 1 191,2 036 mAh/g in the first and dropped to 188,198 mAh/g after 20 cycles with the efficiency above 90;. The result shows that the porous silicon materials has lon- ger cycle life than single-crystal silicon,which can improve lithium;s profermance.
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