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Influence of the hydrogen implantation power density on ion cutting of Ge
  • ISSN号：0734-211X
  • 期刊名称：Journal of Vacuum Science and Technology B: Microe
  • 时间：2013
  • 页码：1-4
  • 相关项目：硅基锗材料外延及其相关器件基础研究
作者： Ruan, Yujiao, Wang Lin, Songyan Chen, Cheng Li, H|Jun Li|
同期刊论文项目
硅基锗材料外延及其相关器件基础研究
期刊论文 141 会议论文 16
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